세계의 HF 증기 기상 에칭 장비 : 시장 점유율과 순위, 전체 판매량 및 수요 예측(2025-2031년)

The global market for HF Vapor Phase Etcher was estimated to be worth US$ 137 million in 2024 and is forecast to a readjusted size of US$ 202 million by 2031 with a CAGR of 5.8% during the forecast period 2025-2031.

This report provides a comprehensive assessment of recent tariff adjustments and international strategic countermeasures on HF Vapor Phase Etcher cross-border industrial footprints, capital allocation patterns, regional economic interdependencies, and supply chain reconfigurations.

The HF Vapor Phase Etcher is a specialized semiconductor processing equipment used primarily for isotropic etching of silicon dioxide (SiO2) using hydrogen fluoride (HF) in vapor phase form. Unlike traditional wet etching methods, this dry etching process minimizes surface tension and avoids capillary forces, making it especially suitable for MEMS (Micro-Electro-Mechanical Systems) fabrication, where delicate structures can be damaged by liquid etchants. HF vapor phase etching offers superior selectivity, reduced stiction, and cleaner profiles, enhancing device reliability and performance. Applications extend to the release of microstructures, sacrificial layer removal, and backend-of-line (BEOL) cleaning in IC manufacturing.

In 2024, the global HF Vapor Phase Etcher production reached approximately 380 units. The product price fluctuates greatly due to the model. The average selling price in 2024 was US$350,000 per unit.

Market Trends

As semiconductor manufacturing processes continue to move towards the nanoscale and MEMS devices are widely used in the automotive, medical, communications and other industries, the high-frequency vapor etching machine market has shown a significant growth trend. Its advantages in MEMS release, 3D integration, and advanced packaging are gradually replacing some wet etching and traditional dry technologies. Because HF vapor etching has the characteristics of low surface tension and avoiding structural collapse, it is particularly suitable for high-yield production of complex structure micro-devices and is favored by major wafer fabs and scientific research institutions.

Market Disadvantages

The equipment cost is high, and the main core technology is monopolized by a few international manufacturers, resulting in a high procurement threshold for small and medium-sized manufacturers. HF gas itself is highly corrosive and highly toxic, and has extremely high requirements for the operating environment and safety system, which increases the complexity of equipment installation, operation and maintenance, and personnel training. The replacement of this technology in the traditional wet etching market still faces inertial costs and technology verification cycles, which limits its rapid popularization in the low-end market.

Market Outlook

Equipment manufacturers will further promote module integration, automated control and process compatibility development to meet the wafer fab's demand for high throughput and low defect rates. At the same time, emerging semiconductor regions such as China, South Korea, and Southeast Asia will accelerate the research and development and mass production of local alternative equipment with policy support and capital.

This report aims to provide a comprehensive presentation of the global market for HF Vapor Phase Etcher, focusing on the total sales volume, sales revenue, price, key companies market share and ranking, together with an analysis of HF Vapor Phase Etcher by region & country, by Type, and by Application.

The HF Vapor Phase Etcher market size, estimations, and forecasts are provided in terms of sales volume (Units) and sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding HF Vapor Phase Etcher.

Market Segmentation

By Company

• KLA
• Idonus Sarl
• Shellback
• Advanced Micromachining Tools GmbH
• memsstar Ltd

Segment by Type

• Mass Production
• Small Batch Production

Segment by Application

• Semiconductor
• Universities & Laboratories

By Region

• North America
  • United States
  • Canada
• Asia-Pacific
  • China
  • Japan
  • South Korea
  • Southeast Asia
  • India
  • Australia
  • Rest of Asia-Pacific
• Europe
  • Germany
  • France
  • U.K.
  • Italy
  • Netherlands
  • Nordic Countries
  • Rest of Europe
• Latin America
  • Mexico
  • Brazil
  • Rest of Latin America
• Middle East & Africa
  • Turkey
  • Saudi Arabia
  • UAE
  • Rest of MEA

Chapter Outline

Chapter 1: Introduces the report scope of the report, global total market size (value, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.

Chapter 2: Detailed analysis of HF Vapor Phase Etcher manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc.

Chapter 3: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.

Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.

Chapter 5: Sales, revenue of HF Vapor Phase Etcher in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.

Chapter 6: Sales, revenue of HF Vapor Phase Etcher in country level. It provides sigmate data by Type, and by Application for each country/region.

Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.

Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.

Chapter 9: Conclusion.

Table of Contents

1 Market Overview

• 1.1 HF Vapor Phase Etcher Product Introduction
• 1.2 Global HF Vapor Phase Etcher Market Size Forecast
  • 1.2.1 Global HF Vapor Phase Etcher Sales Value (2020-2031)
  • 1.2.2 Global HF Vapor Phase Etcher Sales Volume (2020-2031)
  • 1.2.3 Global HF Vapor Phase Etcher Sales Price (2020-2031)
• 1.3 HF Vapor Phase Etcher Market Trends & Drivers
  • 1.3.1 HF Vapor Phase Etcher Industry Trends
  • 1.3.2 HF Vapor Phase Etcher Market Drivers & Opportunity
  • 1.3.3 HF Vapor Phase Etcher Market Challenges
  • 1.3.4 HF Vapor Phase Etcher Market Restraints
• 1.4 Assumptions and Limitations
• 1.5 Study Objectives
• 1.6 Years Considered

2 Competitive Analysis by Company

• 2.1 Global HF Vapor Phase Etcher Players Revenue Ranking (2024)
• 2.2 Global HF Vapor Phase Etcher Revenue by Company (2020-2025)
• 2.3 Global HF Vapor Phase Etcher Players Sales Volume Ranking (2024)
• 2.4 Global HF Vapor Phase Etcher Sales Volume by Company Players (2020-2025)
• 2.5 Global HF Vapor Phase Etcher Average Price by Company (2020-2025)
• 2.6 Key Manufacturers HF Vapor Phase Etcher Manufacturing Base and Headquarters
• 2.7 Key Manufacturers HF Vapor Phase Etcher Product Offered
• 2.8 Key Manufacturers Time to Begin Mass Production of HF Vapor Phase Etcher
• 2.9 HF Vapor Phase Etcher Market Competitive Analysis
  • 2.9.1 HF Vapor Phase Etcher Market Concentration Rate (2020-2025)
  • 2.9.2 Global 5 and 10 Largest Manufacturers by HF Vapor Phase Etcher Revenue in 2024
  • 2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in HF Vapor Phase Etcher as of 2024)
• 2.10 Mergers & Acquisitions, Expansion

3 Segmentation by Type

• 3.1 Introduction by Type
  • 3.1.1 Mass Production
  • 3.1.2 Small Batch Production
• 3.2 Global HF Vapor Phase Etcher Sales Value by Type
  • 3.2.1 Global HF Vapor Phase Etcher Sales Value by Type (2020 VS 2024 VS 2031)
  • 3.2.2 Global HF Vapor Phase Etcher Sales Value, by Type (2020-2031)
  • 3.2.3 Global HF Vapor Phase Etcher Sales Value, by Type (%) (2020-2031)
• 3.3 Global HF Vapor Phase Etcher Sales Volume by Type
  • 3.3.1 Global HF Vapor Phase Etcher Sales Volume by Type (2020 VS 2024 VS 2031)
  • 3.3.2 Global HF Vapor Phase Etcher Sales Volume, by Type (2020-2031)
  • 3.3.3 Global HF Vapor Phase Etcher Sales Volume, by Type (%) (2020-2031)
• 3.4 Global HF Vapor Phase Etcher Average Price by Type (2020-2031)

4 Segmentation by Application

• 4.1 Introduction by Application
  • 4.1.1 Semiconductor
  • 4.1.2 Universities & Laboratories
• 4.2 Global HF Vapor Phase Etcher Sales Value by Application
  • 4.2.1 Global HF Vapor Phase Etcher Sales Value by Application (2020 VS 2024 VS 2031)
  • 4.2.2 Global HF Vapor Phase Etcher Sales Value, by Application (2020-2031)
  • 4.2.3 Global HF Vapor Phase Etcher Sales Value, by Application (%) (2020-2031)
• 4.3 Global HF Vapor Phase Etcher Sales Volume by Application
  • 4.3.1 Global HF Vapor Phase Etcher Sales Volume by Application (2020 VS 2024 VS 2031)
  • 4.3.2 Global HF Vapor Phase Etcher Sales Volume, by Application (2020-2031)
  • 4.3.3 Global HF Vapor Phase Etcher Sales Volume, by Application (%) (2020-2031)
• 4.4 Global HF Vapor Phase Etcher Average Price by Application (2020-2031)

5 Segmentation by Region

• 5.1 Global HF Vapor Phase Etcher Sales Value by Region
  • 5.1.1 Global HF Vapor Phase Etcher Sales Value by Region: 2020 VS 2024 VS 2031
  • 5.1.2 Global HF Vapor Phase Etcher Sales Value by Region (2020-2025)
  • 5.1.3 Global HF Vapor Phase Etcher Sales Value by Region (2026-2031)
  • 5.1.4 Global HF Vapor Phase Etcher Sales Value by Region (%), (2020-2031)
• 5.2 Global HF Vapor Phase Etcher Sales Volume by Region
  • 5.2.1 Global HF Vapor Phase Etcher Sales Volume by Region: 2020 VS 2024 VS 2031
  • 5.2.2 Global HF Vapor Phase Etcher Sales Volume by Region (2020-2025)
  • 5.2.3 Global HF Vapor Phase Etcher Sales Volume by Region (2026-2031)
  • 5.2.4 Global HF Vapor Phase Etcher Sales Volume by Region (%), (2020-2031)
• 5.3 Global HF Vapor Phase Etcher Average Price by Region (2020-2031)
• 5.4 North America
  • 5.4.1 North America HF Vapor Phase Etcher Sales Value, 2020-2031
  • 5.4.2 North America HF Vapor Phase Etcher Sales Value by Country (%), 2024 VS 2031
• 5.5 Europe
  • 5.5.1 Europe HF Vapor Phase Etcher Sales Value, 2020-2031
  • 5.5.2 Europe HF Vapor Phase Etcher Sales Value by Country (%), 2024 VS 2031
• 5.6 Asia Pacific
  • 5.6.1 Asia Pacific HF Vapor Phase Etcher Sales Value, 2020-2031
  • 5.6.2 Asia Pacific HF Vapor Phase Etcher Sales Value by Region (%), 2024 VS 2031
• 5.7 South America
  • 5.7.1 South America HF Vapor Phase Etcher Sales Value, 2020-2031
  • 5.7.2 South America HF Vapor Phase Etcher Sales Value by Country (%), 2024 VS 2031
• 5.8 Middle East & Africa
  • 5.8.1 Middle East & Africa HF Vapor Phase Etcher Sales Value, 2020-2031
  • 5.8.2 Middle East & Africa HF Vapor Phase Etcher Sales Value by Country (%), 2024 VS 2031

6 Segmentation by Key Countries/Regions

• 6.1 Key Countries/Regions HF Vapor Phase Etcher Sales Value Growth Trends, 2020 VS 2024 VS 2031
• 6.2 Key Countries/Regions HF Vapor Phase Etcher Sales Value and Sales Volume
  • 6.2.1 Key Countries/Regions HF Vapor Phase Etcher Sales Value, 2020-2031
  • 6.2.2 Key Countries/Regions HF Vapor Phase Etcher Sales Volume, 2020-2031
• 6.3 United States
  • 6.3.1 United States HF Vapor Phase Etcher Sales Value, 2020-2031
  • 6.3.2 United States HF Vapor Phase Etcher Sales Value by Type (%), 2024 VS 2031
  • 6.3.3 United States HF Vapor Phase Etcher Sales Value by Application, 2024 VS 2031
• 6.4 Europe
  • 6.4.1 Europe HF Vapor Phase Etcher Sales Value, 2020-2031
  • 6.4.2 Europe HF Vapor Phase Etcher Sales Value by Type (%), 2024 VS 2031
  • 6.4.3 Europe HF Vapor Phase Etcher Sales Value by Application, 2024 VS 2031
• 6.5 China
  • 6.5.1 China HF Vapor Phase Etcher Sales Value, 2020-2031
  • 6.5.2 China HF Vapor Phase Etcher Sales Value by Type (%), 2024 VS 2031
  • 6.5.3 China HF Vapor Phase Etcher Sales Value by Application, 2024 VS 2031
• 6.6 Japan
  • 6.6.1 Japan HF Vapor Phase Etcher Sales Value, 2020-2031
  • 6.6.2 Japan HF Vapor Phase Etcher Sales Value by Type (%), 2024 VS 2031
  • 6.6.3 Japan HF Vapor Phase Etcher Sales Value by Application, 2024 VS 2031
• 6.7 South Korea
  • 6.7.1 South Korea HF Vapor Phase Etcher Sales Value, 2020-2031
  • 6.7.2 South Korea HF Vapor Phase Etcher Sales Value by Type (%), 2024 VS 2031
  • 6.7.3 South Korea HF Vapor Phase Etcher Sales Value by Application, 2024 VS 2031
• 6.8 Southeast Asia
  • 6.8.1 Southeast Asia HF Vapor Phase Etcher Sales Value, 2020-2031
  • 6.8.2 Southeast Asia HF Vapor Phase Etcher Sales Value by Type (%), 2024 VS 2031
  • 6.8.3 Southeast Asia HF Vapor Phase Etcher Sales Value by Application, 2024 VS 2031
• 6.9 India
  • 6.9.1 India HF Vapor Phase Etcher Sales Value, 2020-2031
  • 6.9.2 India HF Vapor Phase Etcher Sales Value by Type (%), 2024 VS 2031
  • 6.9.3 India HF Vapor Phase Etcher Sales Value by Application, 2024 VS 2031

7 Company Profiles

• 7.1 KLA
  • 7.1.1 KLA Company Information
  • 7.1.2 KLA Introduction and Business Overview
  • 7.1.3 KLA HF Vapor Phase Etcher Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.1.4 KLA HF Vapor Phase Etcher Product Offerings
  • 7.1.5 KLA Recent Development
• 7.2 Idonus Sarl
  • 7.2.1 Idonus Sarl Company Information
  • 7.2.2 Idonus Sarl Introduction and Business Overview
  • 7.2.3 Idonus Sarl HF Vapor Phase Etcher Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.2.4 Idonus Sarl HF Vapor Phase Etcher Product Offerings
  • 7.2.5 Idonus Sarl Recent Development
• 7.3 Shellback
  • 7.3.1 Shellback Company Information
  • 7.3.2 Shellback Introduction and Business Overview
  • 7.3.3 Shellback HF Vapor Phase Etcher Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.3.4 Shellback HF Vapor Phase Etcher Product Offerings
  • 7.3.5 Shellback Recent Development
• 7.4 Advanced Micromachining Tools GmbH
  • 7.4.1 Advanced Micromachining Tools GmbH Company Information
  • 7.4.2 Advanced Micromachining Tools GmbH Introduction and Business Overview
  • 7.4.3 Advanced Micromachining Tools GmbH HF Vapor Phase Etcher Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.4.4 Advanced Micromachining Tools GmbH HF Vapor Phase Etcher Product Offerings
  • 7.4.5 Advanced Micromachining Tools GmbH Recent Development
• 7.5 memsstar Ltd
  • 7.5.1 memsstar Ltd Company Information
  • 7.5.2 memsstar Ltd Introduction and Business Overview
  • 7.5.3 memsstar Ltd HF Vapor Phase Etcher Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.5.4 memsstar Ltd HF Vapor Phase Etcher Product Offerings
  • 7.5.5 memsstar Ltd Recent Development

8 Industry Chain Analysis

• 8.1 HF Vapor Phase Etcher Industrial Chain
• 8.2 HF Vapor Phase Etcher Upstream Analysis
  • 8.2.1 Key Raw Materials
  • 8.2.2 Raw Materials Key Suppliers
  • 8.2.3 Manufacturing Cost Structure
• 8.3 Midstream Analysis
• 8.4 Downstream Analysis (Customers Analysis)
• 8.5 Sales Model and Sales Channels
  • 8.5.1 HF Vapor Phase Etcher Sales Model
  • 8.5.2 Sales Channel
  • 8.5.3 HF Vapor Phase Etcher Distributors

9 Research Findings and Conclusion

10 Appendix

• 10.1 Research Methodology
  • 10.1.1 Methodology/Research Approach
    • 10.1.1.1 Research Programs/Design
    • 10.1.1.2 Market Size Estimation
    • 10.1.1.3 Market Breakdown and Data Triangulation
  • 10.1.2 Data Source
    • 10.1.2.1 Secondary Sources
    • 10.1.2.2 Primary Sources
• 10.2 Author Details
• 10.3 Disclaimer