The global market for Mask Defect Inspection Equipment was estimated to be worth US$ 1776 million in 2024 and is forecast to a readjusted size of US$ 3402 million by 2031 with a CAGR of 9.4% during the forecast period 2025-2031.
This report provides a comprehensive assessment of recent tariff adjustments and international strategic countermeasures on Mask Defect Inspection Equipment cross-border industrial footprints, capital allocation patterns, regional economic interdependencies, and supply chain reconfigurations.
Mask Defect Inspection Equipment is a pattern master used in photolithography in microelectronics manufacturing. An opaque light-shielding film is used to form a mask pattern on a transparent substrate, and the pattern is transferred to the product substrate through exposure.
Market Growth Drivers
Semiconductor Industry Expansion: Accelerated construction of new wafer fabs globally (28 new plants in 2023, including 20 in mainland China), driving the CAGR of photomask demand to 11.77%.
Localization Acceleration: Current domestic production rate of high-end photomasks remains below 20%, with policy support speeding up local capacity expansion (e.g., SPPI's 130-28nm production line to commence in 2025).
Technology Evolution: EUV lithography and advanced packaging (Chiplet/3D IC) require defect density at nanoscale, forcing inspection equipment upgrades.
Technology Trends
High-Resolution Inspection: Rising adoption of E-beam and X-ray systems for sub-3nm defect detection.
AI Integration: AI algorithms enable 30%+ efficiency gains in defect classification and localization (e.g., KLA-Tencor solutions).
Hybrid Modalities: Optical+E-beam hybrid systems dominate for balanced speed/accuracy (e.g., Lasertec's latest models)46.
Emerging Applications
Micro-LED: Mass transfer processes demand photomask defect rates <0.1ppm, spurring new equipment needs.
Automotive Electronics: AEC-Q100 certification elevates inspection standards, requiring high-temp/high-pressure testing capabilities.
This report aims to provide a comprehensive presentation of the global market for Mask Defect Inspection Equipment, focusing on the total sales volume, sales revenue, price, key companies market share and ranking, together with an analysis of Mask Defect Inspection Equipment by region & country, by Type, and by Application.
The Mask Defect Inspection Equipment market size, estimations, and forecasts are provided in terms of sales volume (Units) and sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Mask Defect Inspection Equipment.
Market Segmentation
By Company
- KLA-Tencor
- Applied Materials
- Lasertec
- NuFlare
- Carl Zeiss AG
- Advantest
- VPTEK
- YUWEITEK
Segment by Type
- Photomask Inspection Equipment
- Photomask Substrate Inspection Equipment
Segment by Application
- Semiconductor IC and Chip Manufacturer
- Photomask Factory
- Substrate Manufacturer
By Region
- North America
- Asia-Pacific
- China
- Japan
- South Korea
- Southeast Asia
- India
- Australia
- Rest of Asia-Pacific
- Europe
- Germany
- France
- U.K.
- Italy
- Netherlands
- Nordic Countries
- Rest of Europe
- Latin America
- Mexico
- Brazil
- Rest of Latin America
- Middle East & Africa
- Turkey
- Saudi Arabia
- UAE
- Rest of MEA
Chapter Outline
Chapter 1: Introduces the report scope of the report, global total market size (value, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 2: Detailed analysis of Mask Defect Inspection Equipment manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 5: Sales, revenue of Mask Defect Inspection Equipment in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.
Chapter 6: Sales, revenue of Mask Defect Inspection Equipment in country level. It provides sigmate data by Type, and by Application for each country/region.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Conclusion.
Table of Contents
1 Market Overview
- 1.1 Mask Defect Inspection Equipment Product Introduction
- 1.2 Global Mask Defect Inspection Equipment Market Size Forecast
- 1.2.1 Global Mask Defect Inspection Equipment Sales Value (2020-2031)
- 1.2.2 Global Mask Defect Inspection Equipment Sales Volume (2020-2031)
- 1.2.3 Global Mask Defect Inspection Equipment Sales Price (2020-2031)
- 1.3 Mask Defect Inspection Equipment Market Trends & Drivers
- 1.3.1 Mask Defect Inspection Equipment Industry Trends
- 1.3.2 Mask Defect Inspection Equipment Market Drivers & Opportunity
- 1.3.3 Mask Defect Inspection Equipment Market Challenges
- 1.3.4 Mask Defect Inspection Equipment Market Restraints
- 1.4 Assumptions and Limitations
- 1.5 Study Objectives
- 1.6 Years Considered
2 Competitive Analysis by Company
- 2.1 Global Mask Defect Inspection Equipment Players Revenue Ranking (2024)
- 2.2 Global Mask Defect Inspection Equipment Revenue by Company (2020-2025)
- 2.3 Global Mask Defect Inspection Equipment Players Sales Volume Ranking (2024)
- 2.4 Global Mask Defect Inspection Equipment Sales Volume by Company Players (2020-2025)
- 2.5 Global Mask Defect Inspection Equipment Average Price by Company (2020-2025)
- 2.6 Key Manufacturers Mask Defect Inspection Equipment Manufacturing Base and Headquarters
- 2.7 Key Manufacturers Mask Defect Inspection Equipment Product Offered
- 2.8 Key Manufacturers Time to Begin Mass Production of Mask Defect Inspection Equipment
- 2.9 Mask Defect Inspection Equipment Market Competitive Analysis
- 2.9.1 Mask Defect Inspection Equipment Market Concentration Rate (2020-2025)
- 2.9.2 Global 5 and 10 Largest Manufacturers by Mask Defect Inspection Equipment Revenue in 2024
- 2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Mask Defect Inspection Equipment as of 2024)
- 2.10 Mergers & Acquisitions, Expansion
3 Segmentation by Type
- 3.1 Introduction by Type
- 3.1.1 Photomask Inspection Equipment
- 3.1.2 Photomask Substrate Inspection Equipment
- 3.2 Global Mask Defect Inspection Equipment Sales Value by Type
- 3.2.1 Global Mask Defect Inspection Equipment Sales Value by Type (2020 VS 2024 VS 2031)
- 3.2.2 Global Mask Defect Inspection Equipment Sales Value, by Type (2020-2031)
- 3.2.3 Global Mask Defect Inspection Equipment Sales Value, by Type (%) (2020-2031)
- 3.3 Global Mask Defect Inspection Equipment Sales Volume by Type
- 3.3.1 Global Mask Defect Inspection Equipment Sales Volume by Type (2020 VS 2024 VS 2031)
- 3.3.2 Global Mask Defect Inspection Equipment Sales Volume, by Type (2020-2031)
- 3.3.3 Global Mask Defect Inspection Equipment Sales Volume, by Type (%) (2020-2031)
- 3.4 Global Mask Defect Inspection Equipment Average Price by Type (2020-2031)
4 Segmentation by Application
- 4.1 Introduction by Application
- 4.1.1 Semiconductor IC and Chip Manufacturer
- 4.1.2 Photomask Factory
- 4.1.3 Substrate Manufacturer
- 4.2 Global Mask Defect Inspection Equipment Sales Value by Application
- 4.2.1 Global Mask Defect Inspection Equipment Sales Value by Application (2020 VS 2024 VS 2031)
- 4.2.2 Global Mask Defect Inspection Equipment Sales Value, by Application (2020-2031)
- 4.2.3 Global Mask Defect Inspection Equipment Sales Value, by Application (%) (2020-2031)
- 4.3 Global Mask Defect Inspection Equipment Sales Volume by Application
- 4.3.1 Global Mask Defect Inspection Equipment Sales Volume by Application (2020 VS 2024 VS 2031)
- 4.3.2 Global Mask Defect Inspection Equipment Sales Volume, by Application (2020-2031)
- 4.3.3 Global Mask Defect Inspection Equipment Sales Volume, by Application (%) (2020-2031)
- 4.4 Global Mask Defect Inspection Equipment Average Price by Application (2020-2031)
5 Segmentation by Region
- 5.1 Global Mask Defect Inspection Equipment Sales Value by Region
- 5.1.1 Global Mask Defect Inspection Equipment Sales Value by Region: 2020 VS 2024 VS 2031
- 5.1.2 Global Mask Defect Inspection Equipment Sales Value by Region (2020-2025)
- 5.1.3 Global Mask Defect Inspection Equipment Sales Value by Region (2026-2031)
- 5.1.4 Global Mask Defect Inspection Equipment Sales Value by Region (%), (2020-2031)
- 5.2 Global Mask Defect Inspection Equipment Sales Volume by Region
- 5.2.1 Global Mask Defect Inspection Equipment Sales Volume by Region: 2020 VS 2024 VS 2031
- 5.2.2 Global Mask Defect Inspection Equipment Sales Volume by Region (2020-2025)
- 5.2.3 Global Mask Defect Inspection Equipment Sales Volume by Region (2026-2031)
- 5.2.4 Global Mask Defect Inspection Equipment Sales Volume by Region (%), (2020-2031)
- 5.3 Global Mask Defect Inspection Equipment Average Price by Region (2020-2031)
- 5.4 North America
- 5.4.1 North America Mask Defect Inspection Equipment Sales Value, 2020-2031
- 5.4.2 North America Mask Defect Inspection Equipment Sales Value by Country (%), 2024 VS 2031
- 5.5 Europe
- 5.5.1 Europe Mask Defect Inspection Equipment Sales Value, 2020-2031
- 5.5.2 Europe Mask Defect Inspection Equipment Sales Value by Country (%), 2024 VS 2031
- 5.6 Asia Pacific
- 5.6.1 Asia Pacific Mask Defect Inspection Equipment Sales Value, 2020-2031
- 5.6.2 Asia Pacific Mask Defect Inspection Equipment Sales Value by Region (%), 2024 VS 2031
- 5.7 South America
- 5.7.1 South America Mask Defect Inspection Equipment Sales Value, 2020-2031
- 5.7.2 South America Mask Defect Inspection Equipment Sales Value by Country (%), 2024 VS 2031
- 5.8 Middle East & Africa
- 5.8.1 Middle East & Africa Mask Defect Inspection Equipment Sales Value, 2020-2031
- 5.8.2 Middle East & Africa Mask Defect Inspection Equipment Sales Value by Country (%), 2024 VS 2031
6 Segmentation by Key Countries/Regions
- 6.1 Key Countries/Regions Mask Defect Inspection Equipment Sales Value Growth Trends, 2020 VS 2024 VS 2031
- 6.2 Key Countries/Regions Mask Defect Inspection Equipment Sales Value and Sales Volume
- 6.2.1 Key Countries/Regions Mask Defect Inspection Equipment Sales Value, 2020-2031
- 6.2.2 Key Countries/Regions Mask Defect Inspection Equipment Sales Volume, 2020-2031
- 6.3 United States
- 6.3.1 United States Mask Defect Inspection Equipment Sales Value, 2020-2031
- 6.3.2 United States Mask Defect Inspection Equipment Sales Value by Type (%), 2024 VS 2031
- 6.3.3 United States Mask Defect Inspection Equipment Sales Value by Application, 2024 VS 2031
- 6.4 Europe
- 6.4.1 Europe Mask Defect Inspection Equipment Sales Value, 2020-2031
- 6.4.2 Europe Mask Defect Inspection Equipment Sales Value by Type (%), 2024 VS 2031
- 6.4.3 Europe Mask Defect Inspection Equipment Sales Value by Application, 2024 VS 2031
- 6.5 China
- 6.5.1 China Mask Defect Inspection Equipment Sales Value, 2020-2031
- 6.5.2 China Mask Defect Inspection Equipment Sales Value by Type (%), 2024 VS 2031
- 6.5.3 China Mask Defect Inspection Equipment Sales Value by Application, 2024 VS 2031
- 6.6 Japan
- 6.6.1 Japan Mask Defect Inspection Equipment Sales Value, 2020-2031
- 6.6.2 Japan Mask Defect Inspection Equipment Sales Value by Type (%), 2024 VS 2031
- 6.6.3 Japan Mask Defect Inspection Equipment Sales Value by Application, 2024 VS 2031
- 6.7 South Korea
- 6.7.1 South Korea Mask Defect Inspection Equipment Sales Value, 2020-2031
- 6.7.2 South Korea Mask Defect Inspection Equipment Sales Value by Type (%), 2024 VS 2031
- 6.7.3 South Korea Mask Defect Inspection Equipment Sales Value by Application, 2024 VS 2031
- 6.8 Southeast Asia
- 6.8.1 Southeast Asia Mask Defect Inspection Equipment Sales Value, 2020-2031
- 6.8.2 Southeast Asia Mask Defect Inspection Equipment Sales Value by Type (%), 2024 VS 2031
- 6.8.3 Southeast Asia Mask Defect Inspection Equipment Sales Value by Application, 2024 VS 2031
- 6.9 India
- 6.9.1 India Mask Defect Inspection Equipment Sales Value, 2020-2031
- 6.9.2 India Mask Defect Inspection Equipment Sales Value by Type (%), 2024 VS 2031
- 6.9.3 India Mask Defect Inspection Equipment Sales Value by Application, 2024 VS 2031
7 Company Profiles
- 7.1 KLA-Tencor
- 7.1.1 KLA-Tencor Company Information
- 7.1.2 KLA-Tencor Introduction and Business Overview
- 7.1.3 KLA-Tencor Mask Defect Inspection Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.1.4 KLA-Tencor Mask Defect Inspection Equipment Product Offerings
- 7.1.5 KLA-Tencor Recent Development
- 7.2 Applied Materials
- 7.2.1 Applied Materials Company Information
- 7.2.2 Applied Materials Introduction and Business Overview
- 7.2.3 Applied Materials Mask Defect Inspection Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.2.4 Applied Materials Mask Defect Inspection Equipment Product Offerings
- 7.2.5 Applied Materials Recent Development
- 7.3 Lasertec
- 7.3.1 Lasertec Company Information
- 7.3.2 Lasertec Introduction and Business Overview
- 7.3.3 Lasertec Mask Defect Inspection Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.3.4 Lasertec Mask Defect Inspection Equipment Product Offerings
- 7.3.5 Lasertec Recent Development
- 7.4 NuFlare
- 7.4.1 NuFlare Company Information
- 7.4.2 NuFlare Introduction and Business Overview
- 7.4.3 NuFlare Mask Defect Inspection Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.4.4 NuFlare Mask Defect Inspection Equipment Product Offerings
- 7.4.5 NuFlare Recent Development
- 7.5 Carl Zeiss AG
- 7.5.1 Carl Zeiss AG Company Information
- 7.5.2 Carl Zeiss AG Introduction and Business Overview
- 7.5.3 Carl Zeiss AG Mask Defect Inspection Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.5.4 Carl Zeiss AG Mask Defect Inspection Equipment Product Offerings
- 7.5.5 Carl Zeiss AG Recent Development
- 7.6 Advantest
- 7.6.1 Advantest Company Information
- 7.6.2 Advantest Introduction and Business Overview
- 7.6.3 Advantest Mask Defect Inspection Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.6.4 Advantest Mask Defect Inspection Equipment Product Offerings
- 7.6.5 Advantest Recent Development
- 7.7 VPTEK
- 7.7.1 VPTEK Company Information
- 7.7.2 VPTEK Introduction and Business Overview
- 7.7.3 VPTEK Mask Defect Inspection Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.7.4 VPTEK Mask Defect Inspection Equipment Product Offerings
- 7.7.5 VPTEK Recent Development
- 7.8 YUWEITEK
- 7.8.1 YUWEITEK Company Information
- 7.8.2 YUWEITEK Introduction and Business Overview
- 7.8.3 YUWEITEK Mask Defect Inspection Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
- 7.8.4 YUWEITEK Mask Defect Inspection Equipment Product Offerings
- 7.8.5 YUWEITEK Recent Development
8 Industry Chain Analysis
- 8.1 Mask Defect Inspection Equipment Industrial Chain
- 8.2 Mask Defect Inspection Equipment Upstream Analysis
- 8.2.1 Key Raw Materials
- 8.2.2 Raw Materials Key Suppliers
- 8.2.3 Manufacturing Cost Structure
- 8.3 Midstream Analysis
- 8.4 Downstream Analysis (Customers Analysis)
- 8.5 Sales Model and Sales Channels
- 8.5.1 Mask Defect Inspection Equipment Sales Model
- 8.5.2 Sales Channel
- 8.5.3 Mask Defect Inspection Equipment Distributors
9 Research Findings and Conclusion
10 Appendix
- 10.1 Research Methodology
- 10.1.1 Methodology/Research Approach
- 10.1.1.1 Research Programs/Design
- 10.1.1.2 Market Size Estimation
- 10.1.1.3 Market Breakdown and Data Triangulation
- 10.1.2 Data Source
- 10.1.2.1 Secondary Sources
- 10.1.2.2 Primary Sources
- 10.2 Author Details
- 10.3 Disclaimer