드라이 에칭 장비 : 세계 시장 점유율과 순위, 총판매량 및 수요 예측(2025-2031년)

The global market for Dry Etching Equipment was estimated to be worth US$ 12500 million in 2024 and is forecast to a readjusted size of US$ 19190 million by 2031 with a CAGR of 6.4% during the forecast period 2025-2031.

This report provides a comprehensive assessment of recent tariff adjustments and international strategic countermeasures on Dry Etching Equipment cross-border industrial footprints, capital allocation patterns, regional economic interdependencies, and supply chain reconfigurations.

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface.

Currently, global production of Dry Etching Equipment is concentrated. The top three manufacturers held 92.16% of the market, in terms of Dry Etching Equipment sales value in 2019. As for the region, APAC is the largest consumption region, holding 76.07% sales revenue market share in 2019, followed by North America, with 13% market share.

With the continuous reduction of integrated circuit process, especially the production of 7nm-28nm advanced process, the demand for dry etching equipment continues to increase. Since DUV lithography machines are limited by the wavelength of light, wafer fabs need to adopt multiple mask processes and use etching processes to achieve smaller sizes. The etching process required for 7nm integrated circuit production is 140 times, which is 2.5 times the 40 times required for 28nm production.

Etching equipment accounts for the highest proportion in the global semiconductor equipment market.

Global competition:

The global etching equipment market presents a highly concentrated competition pattern, with international giants such as Lam Research, Applied Materials, and Tokyo Electron occupying a dominant position. These companies have advanced technology and rich customer resources and have strong competitiveness in the global market.

Chinese competition:

In the Chinese market, local companies such as AMEC and North Huachuang have strong competitiveness in the field of etching machines and have become leading companies in the domestic etching machine industry. These companies continue to increase R&D investment, improve product performance and technical level, and actively seize market share.

Technological progress:

With the continuous advancement of semiconductor technology, the line width of integrated circuits continues to decrease, and the requirements for etching equipment are getting higher and higher.

The development of 3D integrated circuits has promoted the development of etching technology. For example, the competition for the number of stacking layers of 3D NAND has put forward higher requirements for high aspect ratio etching and multi-stack stacking technology.

Market demand:

The rapid development of artificial intelligence, 5G, Internet of Things and other fields has driven the increase in demand for semiconductor chips, which in turn has promoted the growth of the etching equipment market.

Mainland China has become the world's largest semiconductor equipment market for four consecutive years, and the number of new wafer fab projects ranks first in the world, providing a broad development space for the dry etching equipment market.

Policy support:

The Chinese government has continuously issued relevant policies to support the development of the semiconductor industry, including increasing R&D investment and improving the localization rate, which will further promote the growth of the dry etching equipment market.

In summary, the dry etching equipment market has broad development prospects and huge market potential. With technological progress, increased market demand and continuous strengthening of policy support, the dry etching equipment market will continue to grow.

This report aims to provide a comprehensive presentation of the global market for Dry Etching Equipment, focusing on the total sales volume, sales revenue, price, key companies market share and ranking, together with an analysis of Dry Etching Equipment by region & country, by Type, and by Application.

The Dry Etching Equipment market size, estimations, and forecasts are provided in terms of sales volume (Units) and sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Dry Etching Equipment.

Market Segmentation

By Company

• Lam Research
• Tokyo Electron Limited
• Applied Materials
• Hitachi High-Tech
• SEMES
• AMEC
• NAURA
• SPTS Technologies (KLA)
• Oxford Instruments
• ULVAC
• Plasma-Therm
• GigaLane
• VM
• Jusung Engineering
• SAMCO

Segment by Type

• Inductively Coupled Plasma (ICP)
• Capacitive Coupled Plasma (CCP)
• Reactive Ion Etching (RIE)
• Deep Reactive Ion Etching (DRIE)
• Others

Segment by Application

• Logic and Memory
• MEMS
• Power Device
• Others

By Region

• North America
  • United States
  • Canada
• Asia-Pacific
  • China
  • Japan
  • South Korea
  • Southeast Asia
  • India
  • Australia
  • Rest of Asia-Pacific
• Europe
  • Germany
  • France
  • U.K.
  • Italy
  • Netherlands
  • Nordic Countries
  • Rest of Europe
• Latin America
  • Mexico
  • Brazil
  • Rest of Latin America
• Middle East & Africa
  • Turkey
  • Saudi Arabia
  • UAE
  • Rest of MEA

Chapter Outline

Chapter 1: Introduces the report scope of the report, global total market size (value, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.

Chapter 2: Detailed analysis of Dry Etching Equipment manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc.

Chapter 3: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.

Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.

Chapter 5: Sales, revenue of Dry Etching Equipment in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.

Chapter 6: Sales, revenue of Dry Etching Equipment in country level. It provides sigmate data by Type, and by Application for each country/region.

Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc.

Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.

Chapter 9: Conclusion.

Table of Contents

1 Market Overview

• 1.1 Dry Etching Equipment Product Introduction
• 1.2 Global Dry Etching Equipment Market Size Forecast
  • 1.2.1 Global Dry Etching Equipment Sales Value (2020-2031)
  • 1.2.2 Global Dry Etching Equipment Sales Volume (2020-2031)
  • 1.2.3 Global Dry Etching Equipment Sales Price (2020-2031)
• 1.3 Dry Etching Equipment Market Trends & Drivers
  • 1.3.1 Dry Etching Equipment Industry Trends
  • 1.3.2 Dry Etching Equipment Market Drivers & Opportunity
  • 1.3.3 Dry Etching Equipment Market Challenges
  • 1.3.4 Dry Etching Equipment Market Restraints
• 1.4 Assumptions and Limitations
• 1.5 Study Objectives
• 1.6 Years Considered

2 Competitive Analysis by Company

• 2.1 Global Dry Etching Equipment Players Revenue Ranking (2024)
• 2.2 Global Dry Etching Equipment Revenue by Company (2020-2025)
• 2.3 Global Dry Etching Equipment Players Sales Volume Ranking (2024)
• 2.4 Global Dry Etching Equipment Sales Volume by Company Players (2020-2025)
• 2.5 Global Dry Etching Equipment Average Price by Company (2020-2025)
• 2.6 Key Manufacturers Dry Etching Equipment Manufacturing Base and Headquarters
• 2.7 Key Manufacturers Dry Etching Equipment Product Offered
• 2.8 Key Manufacturers Time to Begin Mass Production of Dry Etching Equipment
• 2.9 Dry Etching Equipment Market Competitive Analysis
  • 2.9.1 Dry Etching Equipment Market Concentration Rate (2020-2025)
  • 2.9.2 Global 5 and 10 Largest Manufacturers by Dry Etching Equipment Revenue in 2024
  • 2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Dry Etching Equipment as of 2024)
• 2.10 Mergers & Acquisitions, Expansion

3 Segmentation by Type

• 3.1 Introduction by Type
  • 3.1.1 Inductively Coupled Plasma (ICP)
  • 3.1.2 Capacitive Coupled Plasma (CCP)
  • 3.1.3 Reactive Ion Etching (RIE)
  • 3.1.4 Deep Reactive Ion Etching (DRIE)
  • 3.1.5 Others
• 3.2 Global Dry Etching Equipment Sales Value by Type
  • 3.2.1 Global Dry Etching Equipment Sales Value by Type (2020 VS 2024 VS 2031)
  • 3.2.2 Global Dry Etching Equipment Sales Value, by Type (2020-2031)
  • 3.2.3 Global Dry Etching Equipment Sales Value, by Type (%) (2020-2031)
• 3.3 Global Dry Etching Equipment Sales Volume by Type
  • 3.3.1 Global Dry Etching Equipment Sales Volume by Type (2020 VS 2024 VS 2031)
  • 3.3.2 Global Dry Etching Equipment Sales Volume, by Type (2020-2031)
  • 3.3.3 Global Dry Etching Equipment Sales Volume, by Type (%) (2020-2031)
• 3.4 Global Dry Etching Equipment Average Price by Type (2020-2031)

4 Segmentation by Application

• 4.1 Introduction by Application
  • 4.1.1 Logic and Memory
  • 4.1.2 MEMS
  • 4.1.3 Power Device
  • 4.1.4 Others
• 4.2 Global Dry Etching Equipment Sales Value by Application
  • 4.2.1 Global Dry Etching Equipment Sales Value by Application (2020 VS 2024 VS 2031)
  • 4.2.2 Global Dry Etching Equipment Sales Value, by Application (2020-2031)
  • 4.2.3 Global Dry Etching Equipment Sales Value, by Application (%) (2020-2031)
• 4.3 Global Dry Etching Equipment Sales Volume by Application
  • 4.3.1 Global Dry Etching Equipment Sales Volume by Application (2020 VS 2024 VS 2031)
  • 4.3.2 Global Dry Etching Equipment Sales Volume, by Application (2020-2031)
  • 4.3.3 Global Dry Etching Equipment Sales Volume, by Application (%) (2020-2031)
• 4.4 Global Dry Etching Equipment Average Price by Application (2020-2031)

5 Segmentation by Region

• 5.1 Global Dry Etching Equipment Sales Value by Region
  • 5.1.1 Global Dry Etching Equipment Sales Value by Region: 2020 VS 2024 VS 2031
  • 5.1.2 Global Dry Etching Equipment Sales Value by Region (2020-2025)
  • 5.1.3 Global Dry Etching Equipment Sales Value by Region (2026-2031)
  • 5.1.4 Global Dry Etching Equipment Sales Value by Region (%), (2020-2031)
• 5.2 Global Dry Etching Equipment Sales Volume by Region
  • 5.2.1 Global Dry Etching Equipment Sales Volume by Region: 2020 VS 2024 VS 2031
  • 5.2.2 Global Dry Etching Equipment Sales Volume by Region (2020-2025)
  • 5.2.3 Global Dry Etching Equipment Sales Volume by Region (2026-2031)
  • 5.2.4 Global Dry Etching Equipment Sales Volume by Region (%), (2020-2031)
• 5.3 Global Dry Etching Equipment Average Price by Region (2020-2031)
• 5.4 North America
  • 5.4.1 North America Dry Etching Equipment Sales Value, 2020-2031
  • 5.4.2 North America Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
• 5.5 Europe
  • 5.5.1 Europe Dry Etching Equipment Sales Value, 2020-2031
  • 5.5.2 Europe Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
• 5.6 Asia Pacific
  • 5.6.1 Asia Pacific Dry Etching Equipment Sales Value, 2020-2031
  • 5.6.2 Asia Pacific Dry Etching Equipment Sales Value by Region (%), 2024 VS 2031
• 5.7 South America
  • 5.7.1 South America Dry Etching Equipment Sales Value, 2020-2031
  • 5.7.2 South America Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031
• 5.8 Middle East & Africa
  • 5.8.1 Middle East & Africa Dry Etching Equipment Sales Value, 2020-2031
  • 5.8.2 Middle East & Africa Dry Etching Equipment Sales Value by Country (%), 2024 VS 2031

6 Segmentation by Key Countries/Regions

• 6.1 Key Countries/Regions Dry Etching Equipment Sales Value Growth Trends, 2020 VS 2024 VS 2031
• 6.2 Key Countries/Regions Dry Etching Equipment Sales Value and Sales Volume
  • 6.2.1 Key Countries/Regions Dry Etching Equipment Sales Value, 2020-2031
  • 6.2.2 Key Countries/Regions Dry Etching Equipment Sales Volume, 2020-2031
• 6.3 United States
  • 6.3.1 United States Dry Etching Equipment Sales Value, 2020-2031
  • 6.3.2 United States Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • 6.3.3 United States Dry Etching Equipment Sales Value by Application, 2024 VS 2031
• 6.4 Europe
  • 6.4.1 Europe Dry Etching Equipment Sales Value, 2020-2031
  • 6.4.2 Europe Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • 6.4.3 Europe Dry Etching Equipment Sales Value by Application, 2024 VS 2031
• 6.5 China
  • 6.5.1 China Dry Etching Equipment Sales Value, 2020-2031
  • 6.5.2 China Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • 6.5.3 China Dry Etching Equipment Sales Value by Application, 2024 VS 2031
• 6.6 Japan
  • 6.6.1 Japan Dry Etching Equipment Sales Value, 2020-2031
  • 6.6.2 Japan Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • 6.6.3 Japan Dry Etching Equipment Sales Value by Application, 2024 VS 2031
• 6.7 South Korea
  • 6.7.1 South Korea Dry Etching Equipment Sales Value, 2020-2031
  • 6.7.2 South Korea Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • 6.7.3 South Korea Dry Etching Equipment Sales Value by Application, 2024 VS 2031
• 6.8 Southeast Asia
  • 6.8.1 Southeast Asia Dry Etching Equipment Sales Value, 2020-2031
  • 6.8.2 Southeast Asia Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • 6.8.3 Southeast Asia Dry Etching Equipment Sales Value by Application, 2024 VS 2031
• 6.9 India
  • 6.9.1 India Dry Etching Equipment Sales Value, 2020-2031
  • 6.9.2 India Dry Etching Equipment Sales Value by Type (%), 2024 VS 2031
  • 6.9.3 India Dry Etching Equipment Sales Value by Application, 2024 VS 2031

7 Company Profiles

• 7.1 Lam Research
  • 7.1.1 Lam Research Company Information
  • 7.1.2 Lam Research Introduction and Business Overview
  • 7.1.3 Lam Research Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.1.4 Lam Research Dry Etching Equipment Product Offerings
  • 7.1.5 Lam Research Recent Development
• 7.2 Tokyo Electron Limited
  • 7.2.1 Tokyo Electron Limited Company Information
  • 7.2.2 Tokyo Electron Limited Introduction and Business Overview
  • 7.2.3 Tokyo Electron Limited Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.2.4 Tokyo Electron Limited Dry Etching Equipment Product Offerings
  • 7.2.5 Tokyo Electron Limited Recent Development
• 7.3 Applied Materials
  • 7.3.1 Applied Materials Company Information
  • 7.3.2 Applied Materials Introduction and Business Overview
  • 7.3.3 Applied Materials Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.3.4 Applied Materials Dry Etching Equipment Product Offerings
  • 7.3.5 Applied Materials Recent Development
• 7.4 Hitachi High-Tech
  • 7.4.1 Hitachi High-Tech Company Information
  • 7.4.2 Hitachi High-Tech Introduction and Business Overview
  • 7.4.3 Hitachi High-Tech Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.4.4 Hitachi High-Tech Dry Etching Equipment Product Offerings
  • 7.4.5 Hitachi High-Tech Recent Development
• 7.5 SEMES
  • 7.5.1 SEMES Company Information
  • 7.5.2 SEMES Introduction and Business Overview
  • 7.5.3 SEMES Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.5.4 SEMES Dry Etching Equipment Product Offerings
  • 7.5.5 SEMES Recent Development
• 7.6 AMEC
  • 7.6.1 AMEC Company Information
  • 7.6.2 AMEC Introduction and Business Overview
  • 7.6.3 AMEC Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.6.4 AMEC Dry Etching Equipment Product Offerings
  • 7.6.5 AMEC Recent Development
• 7.7 NAURA
  • 7.7.1 NAURA Company Information
  • 7.7.2 NAURA Introduction and Business Overview
  • 7.7.3 NAURA Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.7.4 NAURA Dry Etching Equipment Product Offerings
  • 7.7.5 NAURA Recent Development
• 7.8 SPTS Technologies (KLA)
  • 7.8.1 SPTS Technologies (KLA) Company Information
  • 7.8.2 SPTS Technologies (KLA) Introduction and Business Overview
  • 7.8.3 SPTS Technologies (KLA) Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.8.4 SPTS Technologies (KLA) Dry Etching Equipment Product Offerings
  • 7.8.5 SPTS Technologies (KLA) Recent Development
• 7.9 Oxford Instruments
  • 7.9.1 Oxford Instruments Company Information
  • 7.9.2 Oxford Instruments Introduction and Business Overview
  • 7.9.3 Oxford Instruments Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.9.4 Oxford Instruments Dry Etching Equipment Product Offerings
  • 7.9.5 Oxford Instruments Recent Development
• 7.10 ULVAC
  • 7.10.1 ULVAC Company Information
  • 7.10.2 ULVAC Introduction and Business Overview
  • 7.10.3 ULVAC Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.10.4 ULVAC Dry Etching Equipment Product Offerings
  • 7.10.5 ULVAC Recent Development
• 7.11 Plasma-Therm
  • 7.11.1 Plasma-Therm Company Information
  • 7.11.2 Plasma-Therm Introduction and Business Overview
  • 7.11.3 Plasma-Therm Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.11.4 Plasma-Therm Dry Etching Equipment Product Offerings
  • 7.11.5 Plasma-Therm Recent Development
• 7.12 GigaLane
  • 7.12.1 GigaLane Company Information
  • 7.12.2 GigaLane Introduction and Business Overview
  • 7.12.3 GigaLane Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.12.4 GigaLane Dry Etching Equipment Product Offerings
  • 7.12.5 GigaLane Recent Development
• 7.13 VM
  • 7.13.1 VM Company Information
  • 7.13.2 VM Introduction and Business Overview
  • 7.13.3 VM Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.13.4 VM Dry Etching Equipment Product Offerings
  • 7.13.5 VM Recent Development
• 7.14 Jusung Engineering
  • 7.14.1 Jusung Engineering Company Information
  • 7.14.2 Jusung Engineering Introduction and Business Overview
  • 7.14.3 Jusung Engineering Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.14.4 Jusung Engineering Dry Etching Equipment Product Offerings
  • 7.14.5 Jusung Engineering Recent Development
• 7.15 SAMCO
  • 7.15.1 SAMCO Company Information
  • 7.15.2 SAMCO Introduction and Business Overview
  • 7.15.3 SAMCO Dry Etching Equipment Sales, Revenue, Price and Gross Margin (2020-2025)
  • 7.15.4 SAMCO Dry Etching Equipment Product Offerings
  • 7.15.5 SAMCO Recent Development

8 Industry Chain Analysis

• 8.1 Dry Etching Equipment Industrial Chain
• 8.2 Dry Etching Equipment Upstream Analysis
  • 8.2.1 Key Raw Materials
  • 8.2.2 Raw Materials Key Suppliers
  • 8.2.3 Manufacturing Cost Structure
• 8.3 Midstream Analysis
• 8.4 Downstream Analysis (Customers Analysis)
• 8.5 Sales Model and Sales Channels
  • 8.5.1 Dry Etching Equipment Sales Model
  • 8.5.2 Sales Channel
  • 8.5.3 Dry Etching Equipment Distributors

9 Research Findings and Conclusion

10 Appendix

• 10.1 Research Methodology
  • 10.1.1 Methodology/Research Approach
    • 10.1.1.1 Research Programs/Design
    • 10.1.1.2 Market Size Estimation
    • 10.1.1.3 Market Breakdown and Data Triangulation
  • 10.1.2 Data Source
    • 10.1.2.1 Secondary Sources
    • 10.1.2.2 Primary Sources
• 10.2 Author Details
• 10.3 Disclaimer