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시장보고서
상품코드
1873433
세계의 챔버 부품용 PVD 및 ALD 코팅 시장 : 시장 점유율과 순위, 전체 판매 및 수요 예측(2025-2031년)PVD and ALD Coating for Chamber Components - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031 |
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QYResearch
세계의 챔버 부품용 PVD 및 ALD 코팅 시장 규모는 2024년에 5,370만 달러로 추정되며, 2025년부터 2031년까지 예측 기간 동안 CAGR 9.2%로 성장하여 2031년까지 9,800만 달러로 확대될 것으로 예측됩니다.
챔버 부품용 PVD 및 ALD 코팅은 일반적으로 산화이트륨 또는 산화알루미늄을 기판으로 사용하거나 산화알루미늄(AlON)으로 제조될 수 있습니다. 정확한 화학 성분과 코팅 두께는 용도에 따라 조정해야 합니다. 챔버 내 사용 온도, 처리 시간, 가스는 장치 사양에 따라 크게 다르며, 이러한 변수를 사용하여 요구되는 코팅 성능에 적합한 코팅 조합을 선택합니다. 맞춤형으로 설계된 정밀 코팅은 비용과 성능의 최적 균형을 실현합니다. 성막 챔버에는 디바이스 웨이퍼와 직접 접촉하는 부품과 웨이퍼에 도달하는 공정 화학제품에 노출되는 부품이 다수 존재합니다. 따라서 재료 선택이 매우 중요합니다. 플라즈마 에칭 챔버에서 사용되는 부식성 화학제품은 장비 부품 표면을 침식하고 코팅을 열화시킵니다. 3D 디바이스 가공에서 흔히 발생하는 고온 플라즈마에 장시간 노출되면 이러한 열화가 가속화됩니다. 부식된 표면에서 박리된 입자는 웨이퍼에 증착되어 소자 고장을 유발할 수 있습니다. 플라즈마 스프레이 코팅을 통한 이트륨 산화물 코팅 또는 알루마이트 처리된 알루미늄 부품은 수년 동안 업계 표준으로 채택되어 왔습니다. 이러한 솔루션은 오랫동안 유효했지만, 첨단 공정 노드의 나노스케일 구조에서는 시스템 내 모든 부품에 대해 더 높은 청정도가 요구됩니다. 기존 코팅된 부품은 에칭 챔버나 증착 챔버 내의 가혹한 환경을 견딜 수 있는 내구성이 부족하여 장치의 수율에 영향을 미칠 수 있습니다. 플라즈마 용사 코팅은 비교적 거칠고 다공질인 반면, 아노다이징 코팅은 현장에서 균열이 발생하기 쉽고 열화가 심하다는 문제가 있습니다. 또한, 성막 챔버 내의 부품은 복잡한 형상을 가지고 있기 때문에 평면 표면에 코팅하는 데 적합한 용사 코팅으로는 대응이 어렵습니다. 정밀하게 설계된 특수 코팅은 반도체 웨이퍼 가공과 관련된 진공 박막 기술을 채택하여 기존 코팅을 저하시키는 부식 및 산화에 대한 내성이 우수한 부품을 제조합니다. 물리적 증착법(PVD)과 원자층 증착법(ALD)의 두 가지 방법이 있습니다. 모든 정밀 설계 코팅은 부식성 플라즈마/화학제품 환경에서 최소한의 내마모성 및 내식성을 발휘해야 하며, 기판에 완벽하게 밀착되어 균일한 피막 표면을 형성해야 합니다. 코팅 대상 부품의 형상 및 재질, 챔버의 종류, 처리 조건에 따라 최적의 코팅 화학조성과 방법이 결정됩니다.
챔버 부품용 PVD 및 ALD 코팅의 세계적인 주요 기업으로는 Integris, KoMiCo, Inficon 등이 있습니다. 상위 3개사의 점유율은 약 50%를 차지합니다. 아시아태평양이 가장 큰 시장으로 약 58%, 북미가 35%, 유럽이 7%의 점유율을 차지하고 있습니다. 코팅 방식별로는 PVD 코팅 방식이 가장 큰 비중을 차지하고 있으며, 점유율은 65%를 차지하고 있습니다. 용도별로는 에칭 툴이 가장 큰 분야로 약 86%의 점유율을 차지하고 있습니다.
이 보고서는 챔버 부품용 PVD 및 ALD 코팅 세계 시장에 대해 총 매출액, 주요 기업의 시장 점유율 및 순위, 지역 및 국가별, 코팅 방법별, 용도별 분석을 종합적으로 제시하는 것을 목적으로 합니다.
챔버 부품용 PVD 및 ALD 코팅 시장의 규모, 추정 및 예측은 2024년을 기준 연도로 하여 2020년에서 2031년까지의 과거 데이터와 예측 데이터를 포함하는 매출액 기준으로 제공되었습니다. 정량적, 정성적 분석을 통해 독자들이 비즈니스/성장 전략 수립, 시장 경쟁 평가, 현재 시장에서의 포지셔닝 분석, 챔버 부품용 PVD 및 ALD 코팅에 대한 정보에 입각한 비즈니스 의사결정을 내릴 수 있도록 돕고 있습니다.
시장 세분화
기업별
- TOCALO Co., Ltd.
- KoMiCo
- Cinos
- WONIK QnC
- Oerlikon Balzers
- Beneq
- Entegris
- Inficon
코팅 방법별 부문
- PVD 코팅 방법
- ALD 코팅 방법
용도별 부문
- 에칭 장비
- 증착 장비
지역별
- 북미
- 미국
- 캐나다
- 아시아태평양
- 중국
- 일본
- 한국
- 동남아시아
- 인도
- 호주
- 기타 아시아태평양
- 유럽
- 독일
- 프랑스
- 영국
- 이탈리아
- 네덜란드
- 북유럽 국가
- 기타 유럽
- 라틴아메리카
- 멕시코
- 브라질
- 기타 라틴아메리카
- 중동 및 아프리카
- 튀르키예
- 사우디아라비아
- 아랍에미리트
- 기타 중동 및 아프리카
자주 묻는 질문
The global market for PVD and ALD Coating for Chamber Components was estimated to be worth US$ 53.7 million in 2024 and is forecast to a readjusted size of US$ 98 million by 2031 with a CAGR of 9.2% during the forecast period 2025-2031.
PVD and ALD coatings for chamber components are typically based on yttrium or aluminum oxides or may be made from aluminum oxynitride (AlON). The exact chemistry and coating thickness must be tailored to the application. The use of temperature in the chamber, processing time, and gases vary considerably depending on the device specifications, and these variables are used to select the right combination of coatings for their desired coating performance. Custom precision-engineered coatings provide the optimal balance between cost and performance. Deposition chambers contain various parts and components that either contact the device wafer directly or are exposed to process chemicals that subsequently reach the wafer. As such, material selection is critical. The corrosive chemicals used in plasma-etch chambers attack the tool component surfaces and degrade coatings. Longer exposure to hotter plasmas, which is common for 3D device processing, accelerates degradation. Particles shed from the corroded surfaces then deposit on the wafers, potentially causing device failure. Components protected with yttrium oxide deposited by plasma spray-coating or made from anodized aluminum have long been the industry norm. Although such solutions have worked for many years, the nano-scale features of advanced process nodes demand an increased level of cleanliness for every part in the system. Conventionally coated components are not rugged enough to withstand the aggressive environments inside etch and deposition chambers without impacting device yield. Plasma spray coatings are relatively rough and porous, while anodized coatings exhibit in-situ cracking that makes them degrade too readily. The complex shapes of parts inside deposition chambers also pose a challenge for spray coating, which works best when coating planar surfaces. Precision engineered, specialized coatings borrow vacuum thin film technologies associated with semiconductor wafer processing to produce coated components that can better resist the corrosion and oxidation that degrade conventional coatings. Two options are available: physical vapor deposition (PVD) and atomic layer deposition (ALD). Every precision engineered coating must exhibit a minimum level of wear and corrosion resistance in the presence of corrosive plasma/chemistry and adhere fully to the underlying substrate to create a uniformly coated surface. The geometry and material of the part being coated, the type of chamber, and the processing conditions further dictate the optimal coating chemistry and method.
Global key players of PVD and ALD Coating for Chamber Components include Entegris, KoMiCo, Inficon, etc. The top three players hold a share about 50%. Asia-Pacific is the largest market, and has a share about 58%, followed by North America and Europe with share 35% and 7%, separately. In terms of Coating Method, PVD Coating Method is the largest segment, accounting for a share of 65%. In terms of application, Etching Tools is the largest field with a share about 86 percent.
This report aims to provide a comprehensive presentation of the global market for PVD and ALD Coating for Chamber Components, focusing on the total sales revenue, key companies market share and ranking, together with an analysis of PVD and ALD Coating for Chamber Components by region & country, by Coating Method, and by Application.
The PVD and ALD Coating for Chamber Components market size, estimations, and forecasts are provided in terms of sales revenue ($ millions), considering 2024 as the base year, with history and forecast data for the period from 2020 to 2031. With both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding PVD and ALD Coating for Chamber Components.
Market Segmentation
By Company
- TOCALO Co., Ltd.
- KoMiCo
- Cinos
- WONIK QnC
- Oerlikon Balzers
- Beneq
- Entegris
- Inficon
Segment by Coating Method
- PVD Coating Method
- ALD Coating Method
Segment by Application
- Etching Tools
- Deposition Tools
By Region
- North America
- United States
- Canada
- Asia-Pacific
- China
- Japan
- South Korea
- Southeast Asia
- India
- Australia
- Rest of Asia-Pacific
- Europe
- Germany
- France
- U.K.
- Italy
- Netherlands
- Nordic Countries
- Rest of Europe
- Latin America
- Mexico
- Brazil
- Rest of Latin America
- Middle East & Africa
- Turkey
- Saudi Arabia
- UAE
- Rest of MEA
Chapter Outline
Chapter 1: Introduces the report scope of the report, global total market size. This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 2: Detailed analysis of PVD and ALD Coating for Chamber Components company competitive landscape, revenue market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Provides the analysis of various market segments by Coating Method, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 5: Revenue of PVD and ALD Coating for Chamber Components in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world.
Chapter 6: Revenue of PVD and ALD Coating for Chamber Components in country level. It provides sigmate data by Coating Method, and by Application for each country/region.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product revenue, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Conclusion.
Table of Contents
1 Market Overview
- 1.1 PVD and ALD Coating for Chamber Components Product Introduction
- 1.2 Global PVD and ALD Coating for Chamber Components Market Size Forecast (2020-2031)
- 1.3 PVD and ALD Coating for Chamber Components Market Trends & Drivers
- 1.3.1 PVD and ALD Coating for Chamber Components Industry Trends
- 1.3.2 PVD and ALD Coating for Chamber Components Market Drivers & Opportunity
- 1.3.3 PVD and ALD Coating for Chamber Components Market Challenges
- 1.3.4 PVD and ALD Coating for Chamber Components Market Restraints
- 1.4 Assumptions and Limitations
- 1.5 Study Objectives
- 1.6 Years Considered
2 Competitive Analysis by Company
- 2.1 Global PVD and ALD Coating for Chamber Components Players Revenue Ranking (2024)
- 2.2 Global PVD and ALD Coating for Chamber Components Revenue by Company (2020-2025)
- 2.3 Key Companies PVD and ALD Coating for Chamber Components Manufacturing Base Distribution and Headquarters
- 2.4 Key Companies PVD and ALD Coating for Chamber Components Product Offered
- 2.5 Key Companies Time to Begin Mass Production of PVD and ALD Coating for Chamber Components
- 2.6 PVD and ALD Coating for Chamber Components Market Competitive Analysis
- 2.6.1 PVD and ALD Coating for Chamber Components Market Concentration Rate (2020-2025)
- 2.6.2 Global 5 and 10 Largest Companies by PVD and ALD Coating for Chamber Components Revenue in 2024
- 2.6.3 Global Top Companies by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in PVD and ALD Coating for Chamber Components as of 2024)
- 2.7 Mergers & Acquisitions, Expansion
3 Segmentation by Coating Method
- 3.1 Introduction by Coating Method
- 3.1.1 PVD Coating Method
- 3.1.2 ALD Coating Method
- 3.2 Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method
- 3.2.1 Global PVD and ALD Coating for Chamber Components Sales Value by Coating Method (2020 VS 2024 VS 2031)
- 3.2.2 Global PVD and ALD Coating for Chamber Components Sales Value, by Coating Method (2020-2031)
- 3.2.3 Global PVD and ALD Coating for Chamber Components Sales Value, by Coating Method (%) (2020-2031)
4 Segmentation by Application
- 4.1 Introduction by Application
- 4.1.1 Etching Tools
- 4.1.2 Deposition Tools
- 4.2 Global PVD and ALD Coating for Chamber Components Sales Value by Application
- 4.2.1 Global PVD and ALD Coating for Chamber Components Sales Value by Application (2020 VS 2024 VS 2031)
- 4.2.2 Global PVD and ALD Coating for Chamber Components Sales Value, by Application (2020-2031)
- 4.2.3 Global PVD and ALD Coating for Chamber Components Sales Value, by Application (%) (2020-2031)
5 Segmentation by Region
- 5.1 Global PVD and ALD Coating for Chamber Components Sales Value by Region
- 5.1.1 Global PVD and ALD Coating for Chamber Components Sales Value by Region: 2020 VS 2024 VS 2031
- 5.1.2 Global PVD and ALD Coating for Chamber Components Sales Value by Region (2020-2025)
- 5.1.3 Global PVD and ALD Coating for Chamber Components Sales Value by Region (2026-2031)
- 5.1.4 Global PVD and ALD Coating for Chamber Components Sales Value by Region (%), (2020-2031)
- 5.2 North America
- 5.2.1 North America PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 5.2.2 North America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
- 5.3 Europe
- 5.3.1 Europe PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 5.3.2 Europe PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
- 5.4 Asia Pacific
- 5.4.1 Asia Pacific PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 5.4.2 Asia Pacific PVD and ALD Coating for Chamber Components Sales Value by Region (%), 2024 VS 2031
- 5.5 South America
- 5.5.1 South America PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 5.5.2 South America PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
- 5.6 Middle East & Africa
- 5.6.1 Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 5.6.2 Middle East & Africa PVD and ALD Coating for Chamber Components Sales Value by Country (%), 2024 VS 2031
6 Segmentation by Key Countries/Regions
- 6.1 Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value Growth Trends, 2020 VS 2024 VS 2031
- 6.2 Key Countries/Regions PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 6.3 United States
- 6.3.1 United States PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 6.3.2 United States PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
- 6.3.3 United States PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
- 6.4 Europe
- 6.4.1 Europe PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 6.4.2 Europe PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
- 6.4.3 Europe PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
- 6.5 China
- 6.5.1 China PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 6.5.2 China PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
- 6.5.3 China PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
- 6.6 Japan
- 6.6.1 Japan PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 6.6.2 Japan PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
- 6.6.3 Japan PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
- 6.7 South Korea
- 6.7.1 South Korea PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 6.7.2 South Korea PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
- 6.7.3 South Korea PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
- 6.8 Southeast Asia
- 6.8.1 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 6.8.2 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
- 6.8.3 Southeast Asia PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
- 6.9 India
- 6.9.1 India PVD and ALD Coating for Chamber Components Sales Value, 2020-2031
- 6.9.2 India PVD and ALD Coating for Chamber Components Sales Value by Coating Method (%), 2024 VS 2031
- 6.9.3 India PVD and ALD Coating for Chamber Components Sales Value by Application, 2024 VS 2031
7 Company Profiles
- 7.1 TOCALO Co., Ltd.
- 7.1.1 TOCALO Co., Ltd. Profile
- 7.1.2 TOCALO Co., Ltd. Main Business
- 7.1.3 TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Products, Services and Solutions
- 7.1.4 TOCALO Co., Ltd. PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
- 7.1.5 TOCALO Co., Ltd. Recent Developments
- 7.2 KoMiCo
- 7.2.1 KoMiCo Profile
- 7.2.2 KoMiCo Main Business
- 7.2.3 KoMiCo PVD and ALD Coating for Chamber Components Products, Services and Solutions
- 7.2.4 KoMiCo PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
- 7.2.5 KoMiCo Recent Developments
- 7.3 Cinos
- 7.3.1 Cinos Profile
- 7.3.2 Cinos Main Business
- 7.3.3 Cinos PVD and ALD Coating for Chamber Components Products, Services and Solutions
- 7.3.4 Cinos PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
- 7.3.5 Cinos Recent Developments
- 7.4 WONIK QnC
- 7.4.1 WONIK QnC Profile
- 7.4.2 WONIK QnC Main Business
- 7.4.3 WONIK QnC PVD and ALD Coating for Chamber Components Products, Services and Solutions
- 7.4.4 WONIK QnC PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
- 7.4.5 WONIK QnC Recent Developments
- 7.5 Oerlikon Balzers
- 7.5.1 Oerlikon Balzers Profile
- 7.5.2 Oerlikon Balzers Main Business
- 7.5.3 Oerlikon Balzers PVD and ALD Coating for Chamber Components Products, Services and Solutions
- 7.5.4 Oerlikon Balzers PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
- 7.5.5 Oerlikon Balzers Recent Developments
- 7.6 Beneq
- 7.6.1 Beneq Profile
- 7.6.2 Beneq Main Business
- 7.6.3 Beneq PVD and ALD Coating for Chamber Components Products, Services and Solutions
- 7.6.4 Beneq PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
- 7.6.5 Beneq Recent Developments
- 7.7 Entegris
- 7.7.1 Entegris Profile
- 7.7.2 Entegris Main Business
- 7.7.3 Entegris PVD and ALD Coating for Chamber Components Products, Services and Solutions
- 7.7.4 Entegris PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
- 7.7.5 Entegris Recent Developments
- 7.8 Inficon
- 7.8.1 Inficon Profile
- 7.8.2 Inficon Main Business
- 7.8.3 Inficon PVD and ALD Coating for Chamber Components Products, Services and Solutions
- 7.8.4 Inficon PVD and ALD Coating for Chamber Components Revenue (US$ Million) & (2020-2025)
- 7.8.5 Inficon Recent Developments
8 Industry Chain Analysis
- 8.1 PVD and ALD Coating for Chamber Components Industrial Chain
- 8.2 PVD and ALD Coating for Chamber Components Upstream Analysis
- 8.2.1 Key Raw Materials
- 8.2.2 Raw Materials Key Suppliers
- 8.2.3 Manufacturing Cost Structure
- 8.3 Midstream Analysis
- 8.4 Downstream Analysis (Customers Analysis)
- 8.5 Sales Model and Sales Channels
- 8.5.1 PVD and ALD Coating for Chamber Components Sales Model
- 8.5.2 Sales Channel
- 8.5.3 PVD and ALD Coating for Chamber Components Distributors
9 Research Findings and Conclusion
10 Appendix
- 10.1 Research Methodology
- 10.1.1 Methodology/Research Approach
- 10.1.1.1 Research Programs/Design
- 10.1.1.2 Market Size Estimation
- 10.1.1.3 Market Breakdown and Data Triangulation
- 10.1.2 Data Source
- 10.1.2.1 Secondary Sources
- 10.1.2.2 Primary Sources
- 10.1.1 Methodology/Research Approach
- 10.2 Author Details
- 10.3 Disclaimer
