세계의 반도체 계측 및 검사 장비 시장 규모, 점유율, 동향 분석 보고서 : 기술별, 차원별, 프로세스 노드별, 파브타입별, 지역별, 부문 예측(2025-2033년)

Semiconductor Metrology And Inspection Equipment Market Summary

The global semiconductor metrology and inspection equipment market size was estimated at USD 8.98 billion in 2024, and is projected to reach USD 16.21 billion by 2033, growing at a CAGR of 6.9% from 2025 to 2033. This steady growth is attributed to the increasing complexity of semiconductor device architectures, such as FinFETs, GAA, and 3D NAND, which require advanced inspection and metrology solutions to ensure yield and performance.

In addition, the adoption of EUV lithography, growing investments in sub-7nm process technologies, and expansion of global fab capacity, especially in Asia-Pacific and North America, are fueling demand for high-precision, in-line, and 3D metrology systems.

A major catalyst propelling the growth of the semiconductor metrology and inspection equipment industry is the aggressive funding push from the U.S. government through the CHIPS & Science Act. Since 2022, this legislation has allocated over USD 100 million to research initiatives focused on advanced metrology, with an additional USD 300 million funneled into next-generation packaging metrology through collaborations with NIST and Manufacturing USA. These initiatives are not only supporting the development of inspection tools capable of handling sub-5 nm geometries but are also fueling domestic manufacturing resilience. This infusion of capital is significantly boosting the market by strengthening foundational R&D and accelerating commercialization timelines for metrology innovation.

Another powerful force driving the semiconductor metrology equipment industry is the growing emphasis on standardized, traceable measurements. Government-backed organizations such as Germany's PTB, the UK's NPL, and the U.S. NIST are leading efforts to establish robust calibration systems, from EUV to infrared wavelengths. For example, PTB's Metrology Light Source (MLS) facility is central to enabling high-accuracy tool calibration for semiconductor applications. These traceability frameworks are critical for ensuring consistency in global fab environments, thereby propelling market adoption across geographies by enhancing cross-border interoperability and supplier compliance with precision standards.

The rapid shift toward complex chip packaging, such as Fan-Out Wafer-Level Packaging (FOWLP), System-in-Package (SiP), and 3D ICs, is significantly boosting the demand for innovative inspection and metrology tools. Government-supported research initiatives in North America and Europe are enabling the development of novel metrology techniques like nano-optical tomography and differential Hall effect metrology, which are crucial for identifying defects in these intricate structures. As semiconductor manufacturers increasingly adopt heterogeneous integration and stacked designs, the need for precise measurement systems is becoming indispensable, thereby driving substantial growth in this segment of the market.

Artificial intelligence (AI) and virtual metrology are reshaping the semiconductor inspection landscape and are emerging as transformative market drivers. Government-funded partnerships, such as those formed under the CHIPS Act, are enabling AI-based inspection systems that reduce false positives and enhance pattern recognition. Organizations like SEMI are actively supporting this transformation by establishing data analytics standards and promoting digital twin frameworks for fab operations. These advancements are propelling the market by improving throughput, reducing physical inspection costs, and enabling smarter, faster, and more adaptive quality control systems across semiconductor fabs.

A wave of national semiconductor investment schemes across the globe is creating fertile ground for inspection and metrology tool adoption. From Europe's €3.2 billion IPCEI funding in 2022 to India's USD 10.2 billion semiconductor incentive scheme in 2021 and South Korea's 2023 tax breaks for chipmakers, governments are actively fostering localized production ecosystems. These policy moves are boosting the market by driving new fab construction and backend assembly lines, many of which focus on advanced nodes and packaging technologies that demand state-of-the-art inspection solutions. As countries strive for semiconductor self-sufficiency, the installation of precision metrology tools is rapidly scaling to meet the technological demands of regionalized supply chains.

Global Semiconductor Metrology And Inspection Equipment Market Report Segmentation

This report forecasts revenue growth at the global, regional, and country levels and provides an analysis of the latest industry trends in each of the sub-segments from 2021 to 2033. For this study, Grand View Research has segmented the global semiconductor metrology and inspection equipment market report based on technology, dimension, process node, fab type, and region.

• Technology Outlook (Revenue, USD Million, 2021 - 2033)
• Inspection Equipment
  • Wafer Inspection
  • Defect Inspection
  • Mask/Photomask Inspection
  • Bump and Package Inspection
  • Others
• Metrology Equipment
  • Critical Dimension (CD) Metrology
  • Thin Film Metrology
  • Overlay Metrology
  • Wafer Shape and Surface Metrology
  • Others
• Dimension Outlook (Revenue, USD Million, 2021 - 2033)
• 2D Metrology/Inspection
• 3D Metrology/Inspection
• Hybrid 2D/3D Systems
• Process Node Outlook (Revenue, USD Million, 2021 - 2033)
• <= 7 nm
• 8-14 nm
• 15-28 nm
• 28 nm
• Fab Type Outlook (Revenue, USD Million, 2021 - 2033)
• Foundry
• Memory
• Logic
• Integrated Device Manufacturer (IDM)
• Regional Outlook (Revenue, USD Million, 2021 - 2033)
• North America
  • U.S.
  • Canada
  • Mexico
• Europe
  • Germany
  • UK
  • France
• Asia Pacific
  • China
  • Japan
  • India
  • South Korea
  • Australia
• Latin America
  • Brazil
• Middle East and Africa (MEA)
  • KSA
  • UAE
  • South Africa

Table of Contents

Chapter 1. Methodology and Scope

• 1.1. Market Segmentation and Scope
• 1.2. Research Methodology
  • 1.2.1. Information Procurement
• 1.3. Information or Data Analysis
• 1.4. Methodology
• 1.5. Research Scope and Assumptions
• 1.6. Market Formulation & Validation
• 1.7. Country Based Segment Share Calculation
• 1.8. List of Data Sources

Chapter 2. Executive Summary

• 2.1. Market Outlook
• 2.2. Segment Outlook
• 2.3. Competitive Insights

Chapter 3. Semiconductor Metrology and Inspection Equipment Market Variables, Trends, & Scope

• 3.1. Market Lineage Outlook
• 3.2. Market Dynamics
  • 3.2.1. Market Driver Analysis
  • 3.2.2. Market Restraint Analysis
  • 3.2.3. Industry Challenge
• 3.3. Semiconductor Metrology and Inspection Equipment Market Analysis Tools
  • 3.3.1. Industry Analysis - Porter's
    • 3.3.1.1. Bargaining power of the suppliers
    • 3.3.1.2. Bargaining power of the buyers
    • 3.3.1.3. Threats of substitution
    • 3.3.1.4. Threats from new entrants
    • 3.3.1.5. Competitive rivalry
  • 3.3.2. PESTEL Analysis
    • 3.3.2.1. Political landscape
    • 3.3.2.2. Economic landscape
    • 3.3.2.3. Social landscape
    • 3.3.2.4. Technological landscape
    • 3.3.2.5. Environmental landscape
    • 3.3.2.6. Legal landscape

Chapter 4. Semiconductor Metrology and Inspection Equipment Market: Technology Estimates & Trend Analysis

• 4.1. Segment Dashboard
• 4.2. Semiconductor Metrology and Inspection Equipment Market: Technology Movement Analysis, 2024 & 2033 (USD Million)
• 4.3. Inspection Equipment
  • 4.3.1. Inspection Equipment Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 4.3.2. Wafer Inspection
    • 4.3.2.1. Wafer Inspection Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.3.3. Defect Inspection
    • 4.3.3.1. Defect Inspection Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.3.4. Mask/Photomask Inspection
    • 4.3.4.1. Mask/Photomask Inspection Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.3.5. Bump and Package Inspection
    • 4.3.5.1. Bump and Package Inspection Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.3.6. Others
    • 4.3.6.1. Others Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
• 4.4. Metrology Equipment
  • 4.4.1. Metrology Equipment Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 4.4.2. Critical Dimension (CD) Metrology
    • 4.4.2.1. Critical Dimension (CD) Metrology Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.4.3. Thin Film Metrology
    • 4.4.3.1. Thin Film Metrology Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.4.4. Overlay Metrology
    • 4.4.4.1. Overlay Metrology Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.4.5. Wafer Shape and Surface Metrology
    • 4.4.5.1. Wafer Shape and Surface Metrology Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)
  • 4.4.6. Others
    • 4.4.6.1. Others Market Revenue Estimates and Forecasts, 2018 - 2030 (USD Million)

Chapter 5. Semiconductor Metrology and Inspection Equipment Market: Dimension Estimates & Trend Analysis

• 5.1. Segment Dashboard
• 5.2. Semiconductor Metrology and Inspection Equipment Market: Dimension Movement Analysis, 2024 & 2033 (USD Million)
• 5.3. 2D Metrology/Inspection
  • 5.3.1. 2D Metrology/Inspection Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
• 5.4. 3D Metrology/Inspection
  • 5.4.1. 3D Metrology/Inspection Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
• 5.5. Hybrid 2D/3D Systems
  • 5.5.1. Hybrid 2D/3D Systems Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)

Chapter 6. Semiconductor Metrology and Inspection Equipment Market: Process Node Estimates & Trend Analysis

• 6.1. Segment Dashboard
• 6.2. Semiconductor Metrology and Inspection Equipment Market: Process Node Movement Analysis, 2024 & 2033 (USD Million)
• 6.3. <= 7 nm
  • 6.3.1. <= 7 nm Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
• 6.4. 8-14 nm
  • 6.4.1. 8-14 nm Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
• 6.5. 15-28 nm
  • 6.5.1. 15-28 nm Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
• 6.6. > 28 nm
  • 6.6.1. > 28 nm Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)

Chapter 7. Semiconductor Metrology and Inspection Equipment Market: Fab Type Estimates & Trend Analysis

• 7.1. Segment Dashboard
• 7.2. Semiconductor Metrology and Inspection Equipment Market: Fab Type Movement Analysis, 2024 & 2033 (USD Million)
• 7.3. Foundry
  • 7.3.1. Foundry Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
• 7.4. Memory
  • 7.4.1. Memory Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
• 7.5. Logic
  • 7.5.1. Logic Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)
• 7.6. Integrated Device Manufacturer (IDM)
  • 7.6.1. Integrated Device Manufacturer (IDM) Market Revenue Estimates and Forecasts, 2021 - 2033 (USD Million)

Chapter 8. Semiconductor Metrology and Inspection Equipment Market: Regional Estimates & Trend Analysis

• 8.1. Semiconductor Metrology and Inspection Equipment Market Share, By Region, 2024 & 2033 (USD Million)
• 8.2. North America
  • 8.2.1. North America Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.2.2. U.S.
    • 8.2.2.1. U.S. Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.2.3. Canada
    • 8.2.3.1. Canada Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.2.4. Mexico
    • 8.2.4.1. Mexico Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
• 8.3. Europe
  • 8.3.1. Europe Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.3.2. UK
    • 8.3.2.1. UK Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.3.3. Germany
    • 8.3.3.1. Germany Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.3.4. France
    • 8.3.4.1. France Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
• 8.4. Asia Pacific
  • 8.4.1. Asia Pacific Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.4.2. China
    • 8.4.2.1. China Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.4.3. Japan
    • 8.4.3.1. Japan Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.4.4. India
    • 8.4.4.1. India Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.4.5. South Korea
    • 8.4.5.1. South Korea Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.4.6. Australia
    • 8.4.6.1. Australia Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
• 8.5. Latin America
  • 8.5.1. Latin America Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.5.2. Brazil
    • 8.5.2.1. Brazil Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
• 8.6. Middle East and Africa
  • 8.6.1. Middle East and Africa Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.6.2. UAE
    • 8.6.2.1. UAE Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.6.3. KSA
    • 8.6.3.1. KSA Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)
  • 8.6.4. South Africa
    • 8.6.4.1. South Africa Semiconductor Metrology and Inspection Equipment Market Estimates and Forecasts, 2021 - 2033 (USD Million)

Chapter 9. Competitive Landscape

• 9.1. Company Categorization
• 9.2. Company Market Positioning
• 9.3. Company Heat Map Analysis
• 9.4. Company Profiles/Listing
  • 9.4.1. Applied Materials, Inc.
    • 9.4.1.1. Participant's Overview
    • 9.4.1.2. Financial Performance
    • 9.4.1.3. Product Benchmarking
    • 9.4.1.4. Strategic Initiatives
  • 9.4.2. ASML
    • 9.4.2.1. Participant's Overview
    • 9.4.2.2. Financial Performance
    • 9.4.2.3. Product Benchmarking
    • 9.4.2.4. Strategic Initiatives
  • 9.4.3. Camtek
    • 9.4.3.1. Participant's Overview
    • 9.4.3.2. Financial Performance
    • 9.4.3.3. Product Benchmarking
    • 9.4.3.4. Strategic Initiatives
  • 9.4.4. Hitachi High-Tech Corporation
    • 9.4.4.1. Participant's Overview
    • 9.4.4.2. Financial Performance
    • 9.4.4.3. Product Benchmarking
    • 9.4.4.4. Strategic Initiatives
  • 9.4.5. KLA Corporation
    • 9.4.5.1. Participant's Overview
    • 9.4.5.2. Financial Performance
    • 9.4.5.3. Product Benchmarking
    • 9.4.5.4. Strategic Initiatives
  • 9.4.6. Lasertec Corporation
    • 9.4.6.1. Participant's Overview
    • 9.4.6.2. Financial Performance
    • 9.4.6.3. Product Benchmarking
    • 9.4.6.4. Strategic Initiatives
  • 9.4.7. Nova Ltd.
    • 9.4.7.1. Participant's Overview
    • 9.4.7.2. Financial Performance
    • 9.4.7.3. Product Benchmarking
    • 9.4.7.4. Strategic Initiatives
  • 9.4.8. Onto Innovation
    • 9.4.8.1. Participant's Overview
    • 9.4.8.2. Financial Performance
    • 9.4.8.3. Product Benchmarking
    • 9.4.8.4. Strategic Initiatives
  • 9.4.9. SCREEN Semiconductor Solutions Co., Ltd.
    • 9.4.9.1. Participant's Overview
    • 9.4.9.2. Financial Performance
    • 9.4.9.3. Product Benchmarking
    • 9.4.9.4. Strategic Initiatives
  • 9.4.10. Thermo Fisher Scientific Inc.
    • 9.4.10.1. Participant's Overview
    • 9.4.10.2. Financial Performance
    • 9.4.10.3. Product Benchmarking
    • 9.4.10.4. Strategic Initiatives